JPH0533247Y2 - - Google Patents

Info

Publication number
JPH0533247Y2
JPH0533247Y2 JP15100488U JP15100488U JPH0533247Y2 JP H0533247 Y2 JPH0533247 Y2 JP H0533247Y2 JP 15100488 U JP15100488 U JP 15100488U JP 15100488 U JP15100488 U JP 15100488U JP H0533247 Y2 JPH0533247 Y2 JP H0533247Y2
Authority
JP
Japan
Prior art keywords
arm
cam
angle
transfer arm
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15100488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0270954U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15100488U priority Critical patent/JPH0533247Y2/ja
Priority to US07/421,351 priority patent/US5052884A/en
Publication of JPH0270954U publication Critical patent/JPH0270954U/ja
Application granted granted Critical
Publication of JPH0533247Y2 publication Critical patent/JPH0533247Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Positioning Apparatuses (AREA)
  • Automatic Assembly (AREA)
JP15100488U 1988-10-25 1988-11-18 Expired - Lifetime JPH0533247Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15100488U JPH0533247Y2 (en]) 1988-11-18 1988-11-18
US07/421,351 US5052884A (en) 1988-10-25 1989-10-13 Transferring device for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15100488U JPH0533247Y2 (en]) 1988-11-18 1988-11-18

Publications (2)

Publication Number Publication Date
JPH0270954U JPH0270954U (en]) 1990-05-30
JPH0533247Y2 true JPH0533247Y2 (en]) 1993-08-24

Family

ID=31424660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15100488U Expired - Lifetime JPH0533247Y2 (en]) 1988-10-25 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0533247Y2 (en])

Also Published As

Publication number Publication date
JPH0270954U (en]) 1990-05-30

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